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Semiconductor

Home > Semiconductor
Semiconductor

Reliable temperature control for semiconductor applications.

Mydax delivers high-performance liquid chillers and heat exchangers engineered for the temperature stability, reliability, and precision that semiconductor fabrication, processing, and testing demand.

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Trusted by semiconductor leaders
Micron
Intel
LAM Research
Applied Materials
Advanced cooling solutions for semiconductor processes

Precision cooling for fab, process, and test.

From delicate wafer processing to high-volume production and component testing, Mydax systems hold the tight, repeatable temperatures semiconductor manufacturing requires — supported by both refrigerated chillers and non-refrigerated DI water heat exchangers.

Plasma Vapor Deposition (PVD) wafer processing
Semiconductor process cooling during manufacturing
Component testing requiring precise temperature control
DI water isolation & resistivity maintenance
What sets Mydax apart
Industry first · Since 1986

Patented proportional refrigeration — engineered for precision.

Mydax was the first chiller manufacturer to offer proportional refrigeration control — the technology behind the temperature stability that delicate semiconductor processes depend on.

The problem with conventional chillers

Most wear and breakdowns in chiller operation are caused by On/Off temperature cycling of the refrigeration circuit’s plumbing and components — the cycling that shortens service life and risks process-critical temperature drift.

The Mydax solution

Our proportional design smoothly adjusts refrigerant flow along the compressor’s power curve based on the cooling required, diverting excess capacity to a bypass heat exchanger. The result: tighter temperature stability, less thermal stress, and consistent process yields.

Built for semiconductor precision
✓Extreme temperature precision for delicate processes
✓Superior performance with ±0.05°C stability
✓Scalable solutions for fab and R&D environments
✓Refrigerated chillers & non-refrigerated DI water HX
✓DI resistivity maintained, equipment isolated from facility water
✓Proven with leading semiconductor manufacturers
Our solutions

Three ways Mydax cools semiconductor processes.

CryoDax Low-Temperature Chillers

CryoDax Low-Temperature Chillers

  • Temperature range: −70°C (−94°F) to +150°C (+302°F)
  • Ideal for Plasma Vapor Deposition (PVD) wafer processing
  • Extreme temperature precision for delicate processes
  • Advanced cooling improves efficiency & process consistency
Mydax Air-Cooled and Water-Cooled Chillers

Air-Cooled & Water-Cooled Chillers

  • Semiconductor process cooling during manufacturing
  • Component testing requiring precise temperature control
  • Superior performance with ±0.05°C stability
  • Scalable solutions for fab and R&D environments
Non-Refrigerated DI Water Heat Exchangers

Non-Refrigerated DI Water Heat Exchangers

  • Closed-loop liquid-to-liquid heat exchangers
  • Isolate sensitive equipment from facility water flow
  • Maintain DI resistivity to specified levels
  • Temperature stability within ±0.1°C
Semiconductor specialists

High-performance chillers & heat exchangers, engineered for the fab.

With decades of expertise, Mydax provides industry-leading temperature stability, reliability, and precision to ensure optimal performance during semiconductor fabrication, processing, and testing. Our refrigerated process-cooling recirculating liquid chillers and non-refrigerated liquid-to-liquid heat exchangers are engineered to meet the stringent demands of semiconductor manufacturing.

Semiconductor standard system specifications

Representative semiconductor models.

ModelTemperature RangeBTU/hrkWTonsStabilityHeating Capacity
1M27W0 to +60°C27,0008 kW at 0°C2.25±1.0°C3,000 W
1M16A0 to +60°C16,0004.8 kW at 0°C1.33±1.0°C3,000 W
Mydax chilling solutions

Built for the most demanding thermal challenges.

Custom Temperature Control Solutions

At Mydax, we specialize in custom-engineered recirculating liquid chillers designed for precision temperature control across industries like pharmaceuticals, aerospace, semiconductor manufacturing, and chemical processing. Whether you need ultra-low temperature chilling, multi-loop control, or high-heat stability, our engineered-to-order systems ensure peak performance and efficiency.

Advanced Refrigeration Technology

Our patented proportional refrigeration control sets us apart, delivering unmatched temperature stability and energy efficiency. With air-cooled and water-cooled options, multi-zone configurations, and advanced PLC-based control systems, our chillers provide precise, reliable, and scalable solutions for critical applications.

Industry-Leading Process Chillers

From aerospace and defense to hydrogen FCEV refueling and semiconductor applications, our process chillers are designed for demanding environments. Each unit is built with rugged construction, leak-free pumps, and advanced monitoring systems, ensuring maximum uptime and reliability.

Engineered, Manufactured & Serviced in the USA

Designed, built, and tested in-house, Mydax chillers undergo rigorous quality control to meet the highest industry standards. With a commitment to innovation, durability, and customer support, we deliver turnkey temperature control solutions for the most complex thermal management challenges.

Specifying cooling for a fab or test process?

Tell us your process, temperature, and stability requirements — refrigerated or DI water — and our engineers will match you to the right Mydax system.

Mydax, Inc.
  • Mydax, Inc.
    12260 Shale Ridge Lane
    Auburn, CA 95602-8400
  • Tel: 800-732-2284
  • Fax: 530-888-0962
  • info@mydax.com
  • sales@mydax.com

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